menu


MFC & Flow Products

Overview

Proterial America brings outstanding performance, reliability, and service to the worldwide market for flow control. A robust product portfolio consisting of SAM and Aera brand analog, digital, and pressure insensitive MFCs provide leading edge Mass Flow Control functionality. The offering is further complimented by the Aera brand vapor delivery and exhaust pressure control products.

About MFC & Flow Products

Aera® and SAM brands boast an outstanding reputation for MFC reliability and performance, with hundreds of thousands of units shipped. Reliable flow control for industrial and legacy applications is available with analog MFC product offerings. Leading edge flow control featuring extremely fast response times, very high accuracy, pressure insensitivity are available in the SAM and Aera digital MFC product offerings.

Highly stable and very accurate vapor delivery is provided with the Aera AS and GS family of vapor delivery products. Long regarded as a standard for reliability and performance, this product line provides stable vapor delivery with no need for carrier gas, and with lower maintenance requirements than many other vapor delivery applications can provide. Combining the very high temperature capabilities of the SAM High Temp MFC product line with the Aera vapor delivery systems, a new range of materials can now be delivered as vapor using vapor delivery products from Proterial America.

Fast and reliable exhaust pressure control is available for atmospheric pressure diffusion furnaces with the EPC100 series exhaust pressure controller.

Explore the new Proterial America flow control business. We look forward to discussing your applications with you, and putting our technology to work for you.

Aera® HG200/HC100/HM100 Series

Aera® HG200/HC100/HM100 Series MFC & Flow Products

The HG200/HC100/HM100 Series: Elevating Mass Flow Control in Semiconductor Manufacturing

In the realm of semiconductor manufacturing, the mass flow controller (MFC) stands as one of the most critical devices, evolving hand in hand with advancements in semiconductor processes. Enter the HG200/HC100/HM100 Series - a cutting-edge digital MFC/MFM model that integrates proven technologies to deliver unparalleled performance.

With the HG200/HC100/HM100 Series, we have pushed the boundaries of key performance characteristics to new heights. Experience enhanced response times, bolstered reliability, extended control range, and impeccable flow accuracy - all attributes that define the superiority of this series.

  • Exceptional Performance
  • High speed flow-response
  • 10 million cycle life
  • Self-diagnostic / response learning function

Aera® Transformer®

Aera® Transformer® - MFC & Flow Product

Aera® Transformer® is designed to excel in various applications, including CVD, PVD, diffusion, and etch, our Transformer® MFCs and MFMs will revolutionize your operations, delivering unparalleled flexibility and efficiency. Experience improved yield, higher productivity, and lower cost of ownership like never before.

Powered by advanced sensor and valve technology, field-proven platform components, and high-speed digital circuitry, our Transformer® products guarantee precise gas flow control. You can rely on their superior reliability and exceptional response, accuracy, and repeatability.

Tailored to meet your unique needs, our versatile product line offers both single-gas and multi-gas, multi-range MFCs. This ensures that you have the flexibility to choose the right solution that aligns with your priorities for value and functionality.

  • Excellent Performance
  • Superior Reliability
  • Outstanding Accuracy, Repeatability, and Stability
  • Maximum Ease and Versatility
  • Substantial Cost Savings

Aera® FC-R7800 Series

Aera® FC-R7800 Series MFC & Flow Product

Introducing the all-new Proterial Aera® FC-R7800 Series® an exceptional solution designed to revolutionize gas-control applications. With its cutting-edge features, this advanced system offers a seamless analog flow control experience, while guaranteeing unparalleled corrosion resistance and superior leak integrity through its robust metal seals.

Experience simplicity and reliability like never before. The Proterial Aera® FC-R7800 Series is meticulously crafted to cater to the diverse needs of gas-control applications, making it the perfect choice for a wide range of industries. Say goodbye to complications and embrace effortless control with our state-of-the-art technology.

Discover a new level of precision and performance. Trust in Proterial Aera® FC-R7800 Series to provide exceptional durability, ensuring your operations run smoothly and efficiently. Whether it's managing gas flow in industrial processes or maintaining optimal performance in critical systems, this innovative solution delivers unmatched results.

  • Very Good Performance
  • Fast Response
  • Superior Reliability
  • Easy Integration

Aera® FC-R7700 Series

Aera® FC-R7700 Series MFC & Flow Product

Engineered as the field-proven standard, Proterial's Aera® FC-R7700 Series offers economical analog-controlled, elastomer-sealed mass flow control performance. Designed specifically for process and equipment engineers in the semiconductor, flat panel display, data storage, industrial vacuum, and industrial coating markets, this exceptional series delivers high reliability and superior performance for non-corrosive gas applications.

Whether you're involved in CVD, PVD, etch, ion implantation, sputtering, thermal oxidation, optical glass coating, optical fiber, surface treatment, or other coating processes, the FC-R7700 Series is tailored to meet your specific needs. With its proven track record, it has gained the trust of industry professionals.

Experience peace of mind with our FC-R7700 Series, knowing that you can rely on its robust performance and unwavering reliability. Its elastomer-sealed design ensures efficient gas control, while the analog control offers cost-effective yet precise management of your processes.

  • Good Performance
  • Low Cost
  • Easy Integration
  • Fast Response
  • Unsurpassed Reliability



page top